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Nanostructuring Research Group

In the Nanostructuring Research Group (NRG), we focus on beam
assisted functional materials structuring and characterization of the
functionality. Main functionalities are passive and active optical integrated
elements in monolytic oxide materials (waveguides, amplifiers, lasers,
filters). Other passive optical elements are patterned mask materials for
present and future optical lithography masks with sub-50 nm resolution.

Furthermore the combination of surface structuring for optical and wetting
functionality is investigated. Switchable wetting properties completely
embedded in substrates open novel routes in controlled micro-fluidics. The
developed technologies are compared with classical clean room fabrication
methods, realized in CMI.

Our vision is: to discover and implement a variety of technologies for flexible fabrication of integrated active and passive optical systems.

In combination with electrically and/or optically actuated movement of solids and liquids, a new generation of fully integrated micro-opto-electrical mechanical systems (MOEMS) will result. They will find applications in a large range of high-tech products.